Reduce process development costs and enhance communication in the fab with SEMulator3D.

Virtual Fabrication

What if you could see your MEMS or Semiconductor device in 3D before fabrication?  Could you find and fix problems faster or sooner?  Would you save time and money?

With SEMulator3D, you can.

SEMulator3D emulates Silicon processing in software, allowing you to fabricate your device in a virtual 3D environment.

Reduce your process development/integration costs by finding problems in a virtual 3D environment before fabrication.  Enhance communication in the fab with highly detailed, interactive 3D models.

Process Emulation, not Simulation

Traditional process modeling tools (Process TCAD) focus on detailed process simulation, and can generate very detailed models of individual fabrication steps.  While often very useful, process simulation is very compute-intensive and can only model a small area of a die (typically a few transistors).

SEMulator3D uses a proprietary process emulation engine to generate 3D models much more quickly than TCAD or standard solid modeling tools.  SEMulator3D users can predict the combined effects of multiple process steps or an entire process sequence over a significant portion of a die on modest computer hardware.  Virtual process fabrication steps can be calibrated with process data or SEM pictures of fabricated devices.

The SEMulator3D process modeling engine is completely customizable and can be used to model any MEMS or Semiconductor fabrication process:

CMOS Logic

• FEOL and BEOL
• Digital and Analog/Mixed Signal
• Advanced processing nodes (22 and 15 nm)
• Current processing nodes (45 nm and larger)

Memory

• Advanced 6T DRAM cells
• Advanced flash memory cells

CCD Image Sensors

Hard Disk Read/Write Heads

MEMS Processes

• Integram
• MUMPS (Poly, Metal, SOI)
• SUMMiT
• MOSIS

Unique

SEMulator3D is based on an advanced, proprietary voxel modeling engine and is the first modeling tool that can practically create “Silicon-accurate” models of an entire MEMS or Semiconductor fabrication sequence.  The voxel modeling engine faithfully reproduces realistic Silicon processing shapes without suffering from the robustness problems that are common with traditional solid modeling tools.  SEMulator3D has very modest resource requirements and can easily model large areas of a die that would be impossible with other modeling tools.  SEMulator3D models are automatically created from simple geometric inputs, and are easily updated for design or process changes.